IPFN and DF Colloquium: Satoshi Hamaguchi
Satoshi Hamaguchi will deliver an IPFN and DF Colloquium on July 3th 2024, co-organised by the group N-PRiME of the Instituto de Plasmas e Fusão Nuclear, and the scientific area of Plasmas, Lasers and Nuclear Fusion of the Department of Physics at IST.
Future manufacturing technologies for semiconductor devices with physics-based models, data, and AI, by Prof. Satoshi Hamaguchi
3rd July 2024, 4 p.m.
Venue: PA1 auditorium (Alameda campus)
Abstract
Plasma processing technologies, which are widely used for semiconductor device manufacturing, are now facing a paradigm shift as Moore’s law of device-scale shrinkage is near its end and new three-dimensional structures and nonconventional materials are employed in advanced semiconductor devices. Highly innovative plasma processing techniques with atomic-scale accuracy must be developed expeditiously and cost-effectively. For this purpose, a large part of the conventional try-and-error approach for process development must be replaced with more logical approaches. In this presentation, the author first discusses analyses of plasma-material interactions based on atomic-scale numerical simulations combined with beam-surface interaction experiments, using reactive ion etching and atomic-layer etching/deposition as examples of the most challenging processes in semiconductor manufacturing, and then explores the possible use of machine learning/artificial intelligence techniques to make full use of the fundamental scientific data for more efficient process development.
Short bio of the speaker
Dr. Satoshi Hamaguchi is Professor at the Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, Osaka, Japan. His research interest includes plasma processing for semiconductor processing, plasma medicine, nuclear fusion, and data-driven plasma science. Prior to joining Osaka University, he was Associate Professor at the Graduate School of Energy Sciences, Kyoto University, Kyoto, Japan, from 1998 to 2004, Research Staff Member of IBM T. J. Watson Research Center, at Yorktown Heights, New York, USA, from 1990 to 1998, and Research Fellow at the Institute of Fusion Studies, University of Texas, Austin, Texas, USA, from 1988 to 1990. Dr. Hamaguchi has a Ph.D. degree in physics from the University of Tokyo and a Ph.D. degree in mathematics from New York University. He is a Fellow of the American Vacuum Society, American Physical Society, and Japan Society of Applied Physics.
